Hafnium oxide and zirconium oxide atomic layer deposition: Initial precursor and potential side-reaction product pathways with H/Si(100)-2x1
Article Abstract:
Hybrid density functional calculations are carried out using cluster models of the H/Si()-2X1 surface to investigate the mechanistic details of the initial surface reactions occurring in the atomic layer deposition (ALD) of hafnium and zirconium oxides. A comparison of the results obtained for the initial surface reactions for the methylated and chlorinated ALD metal precursors reveals a marked difference in relative energetics.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2005
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A computational study of ligand interactions with hafnium and zirconium metal complexes in the liquid-liquid extraction process
Article Abstract:
A computational study of ligand interactions with hafnium (Hf) and zirconium (Zr) metal complexes that occur in the liquid-liquid extraction of these metals from their aqueous solutions is presented. A conclusion was drawn that primary interaction energies are sufficient to significantly discriminate Hf and Zr complexes and thus can be used to explain Hf and Zr separation.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2004
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[Be.sup.2} hydration in concentrated aqueous solutions of Be[Cl.sub.2]
Article Abstract:
Detailed structural study of [Be.sup.2} ion is carried out using neutron diffraction of concentrated solutions of beryllium chloride at three different concentrations. The results from all three solutions suggest that the [Be.sup.2} ion has a well-defined 4-fold coordinated shell dominated by oxygen atoms.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2008
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