Reactive species generated during wet chemical etching of silicon in HF/HNO3 mixtures

Article Abstract:

The role of intermediate species generated during wet chemical etching of silicon in a HF-rich HF/HNO3 mixture is studied by spectroscopic and analytical methods. Performing of experiments at 1 degree Celsius leads to stabilization of nitrogen intermediate species due to reduction of nitric acid and as the etch rate lowers, the reaction heat can be removed from the silicon surface more efficiently, leading to a better controllability of etching.

Industrial Gas Manufacturing, Industrial gases, Nitrogen, Industrial inorganic chemicals, not elsewhere classified, Silicon, Analysis, Nitrogen (Chemical element), Etching

---

Highly ordered chevron-shaped arrays of continuous copper nano-dot lines formed by electroless deposition on hydrogen-terminated Si(111) surfaces

Article Abstract:

Highly ordered chevron-shaped arrays of continuous copper nano-dot lines are formed by electroless deposition on hydrogen-terminated Si(111) (H-Si(111)) surfaces. The results have indicated that designed ordered metal nanowires can be produced by the electroless deposition method by using H-Si(111) surfaces with well-regulated step lines as a substrate.

Science & research, Silicon & Inorganic Compounds, Research, Nanotechnology, Copper compounds, Silicon compounds, Structure

---

Similar abstracts:

• Abstracts: Interfacial chemistry of pentacene on clean and chemically modified silicon (001) surfaces. Sulfur atoms as tethers for selective attachment of aromatic molecules to silicon(001) surfaces
• Abstracts: Yields and migration distances of reducing equivalents in the radiolysis of silica nanoparticles. Magnetic modification of the external surfaces in the MCM-41 porous silica: synthesis, characterization and functionalization
• Abstracts: Reactions of surface amines with heterobifunctional cross-linkers bearing both succinimidyl ester and maleimide for grafting biomolecules
• Abstracts: Molecular theory for the effects of specific solute-solvent interaction on the diffusion of a solute particle in a molecular liquid
• Abstracts: Calculation of equilibrium compositions of biochemical reaction systems involving water as a reactant. Calculation of equilibrium compositions of systems of enzyme-catalyzed reactions

This website is not affiliated with document authors or copyright owners. This page is provided for informational purposes only. Unintentional errors are possible.