Water vapour uptake in photolithographic polymers observed by infrared near-field scanning optical microscopy in a controlled environment

Article Abstract:

An infrared near-field scanning optical microscope (NSOM) is used in a controlled environment chamber to detect water vapor uptake in thin polymer films. A chemically amplified photoresist sample composed of alternating 2Mum lines of the original 1000 nm thick poly- (tert-butylmethacrylate) (PTBMA) and the photochemically modified 500 nm thick poly (methacrylic acid) (PMAA) is studied both in low and high water vapor environments.

Science & research, Optical Instrument and Lens Manufacturing, Optical instruments and lenses, Optical Microscopes & Parts, Research, Usage, Chemistry, Physical and theoretical, Physical chemistry, Photolithography, Optical microscopes, Water vapour, Water vapor

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Bulk structure of the (inverted) sponge phase of the lytropic mixture of sodium dodecyl sulfate, 1-pentanol, water, and cyclohexane

Article Abstract:

Different techniques are used to characterize the structure of the sponge (L3) phase in the bulk of the partial isothermal surface of the phase diagram of the sodium dodecyl sulfate/ 1-pentanol/ cyclohexane (C6)/ and water mixture. A water layer of thickness delta separates two nonconnected regions in C6.

All Other Basic Inorganic Chemical Manufacturing, Cyclic crudes and intermediates, Cyclic Crude and Intermediate Manufacturing, Industrial inorganic chemicals, not elsewhere classified, Cyclohexane, Sodium Sulfate, Sodium Sulfates, Observations, Surface chemistry, Structure

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