The chemical origin of defects on silicon dioxide exposed to ethanol
Article Abstract:
The adsorption and reaction of ethanol on the metal-free, pure silicon dioxide surface is studied as a model system to explore the chemical origin of the defects, which are detrimental in the gate oxide, exposed to chemical vapors. Its implication to the generations of defects in the silicon dioxide framework and of the stress-induced leakage current is discussed.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2003
User Contributions:
Comment about this article or add new information about this topic:
Experimental and MD Simulations study of CaO-Zr02-Si02 glasses
Article Abstract:
Extensive molecular dynamic simulation that requires an optimized procedure for treating ZrO2-related input is examined. Glasses belonging to the CaO-ZrO2-SiO2 ternary system prepared by melting raw materials at 1600 degree C are described.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2003
User Contributions:
Comment about this article or add new information about this topic:
- Abstracts: The interaction between SDS and lysozyme at the hydrophilic solid-water interface. part 2 The displacement of preadsorbed protein with a cationic surfactant at the hydrophilic SiO2-water interface
- Abstracts: Exploration of the secondary structure specific differential solvation dynamics between the native and molten globule states of the protein HP-36
- Abstracts: Dynamics of a highly charged ion in aqueous solutions: MD simulations of dilute CrCl3 aqueous solutions using interaction potentials based on the hydrated ion concept
- Abstracts: Molecular recognition kinetics of beta-cyclodextrin for several alcohols by ultrasonic relaxation method. Kinetic study for the inclusion complex of carboxylic acids with cyclodextrin by the ultrasonic relaxation method
- Abstracts: Site-specific fragmentation following C:1s core-level photoionization of 1,1,1-trifluoroethane condensed on a Au surface and of a 2,2,2-trifluoroethanol monolayer chemisorbed on a Si(100) surface