Atomic layer deposition growth reactions of Al2O3 on Si (100)-2x1
Article Abstract:
The energetics and atomic details of the atomic layer deposition (ALD) of Al2O3 growth reactions in the early stages of deposition on the Si (100)-2x1 surface are investigated. Careful comparison of the reaction enthalpies suggests a small reactivity dependence on neighboring -OH groups, activating and suppressing the Al- and O-deposition ALD half-reactions respectively.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2004
User Contributions:
Comment about this article or add new information about this topic:
Thin film growth related adsorption study of Al and O ions on an alpha-Al2O3 surface
Article Abstract:
The surface reactivity of alphs-Al2O3 (0001) is investigated using density functional theory. Further, the adsorption process of Al(super +), Al(super 2+), Al(super 3+), and O(super +) are studied in order to identify possible preferential adsorption sites during thin film growth.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2004
User Contributions:
Comment about this article or add new information about this topic:
The effect of Al2O3 barrier layers in TiO2/dye/CuSCN photovoltaic cells explored by recombination and DOS characterization using transient photovoltage measurements
Article Abstract:
Solid-state dye-sensitized solar cells of the type TiO2/dye/CuSCN are made with thin Al2O3 barriers between the TiO2 and the dye. It is further noted that the recombination current in these cells cannot be calculated from the total charge times the first order rate constant.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2005
User Contributions:
Comment about this article or add new information about this topic:
- Abstracts: Adsorption and surface reactions of N(C2H5)3 on powdered TiO2. Chemical heterogeneities in nanometric titanomagnetites prepared by soft chemistry and studied ex situ: evidence for Fe-segregation and oxidation kinetics
- Abstracts: Atomic layer deposition of HfO2 using alkoxides as precursors. A quantum chemical study of the atomic layer deposition of Al2O3 using AlCl3 and H2O as precursors
- Abstracts: Hafnium oxide and zirconium oxide atomic layer deposition: Initial precursor and potential side-reaction product pathways with H/Si(100)-2x1
- Abstracts: Click chemistry on surfaces: 1,3-dipolar cycloaddition reactions of azide-terminated monolayers on silica. Dissolution kinetics of synthetic amorphous silica in biological-like media and its theoretical description
- Abstracts: MP2 study on adsorption of hydrated [Na.sup.+] and [Au.sup.+] cations on the Au(111) surface. Structural characteristics of small magnesium dichloride clusters: a systematic theoretical study