Evaluation of pore structure in pure silica zeolite MFI low-k thin films using positronium annihilation lifetime spectroscopy
Article Abstract:
Positronium annihilation lifetime spectroscopy (PALS) is used to characterize the pore size and pore structure in pure silica zeolite MFI in-situ and spin-on low dielectric constant (low k) zeolite films. The on-wafer PALS method used to estimate the pore size of the micropores is 0.55 plusmn 0.03 nm.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2004
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Determination of pore size in mesoporous thin films from the annihilation lifetime of positronium
Article Abstract:
Extension of the TE model is the RTE model, which accounts for pores of any size at any sample temperature. Beam-positronium annihilation lifetime spectroscopy has been compared, using this model, with other techniques in the characterization of pores in low-K dielectric films.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2001
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Optical properties of thin films of Au@SiO(sub 2) particles
Article Abstract:
The homogenous films of Au@SiO(sub 2) particles are deposited on glass as a prototype 3D "artificial solid" with the help of the LBL method. The films are found to be uniform, colorful and had metallic reflections at low angles of incidence, even at low volume fractions.
Publication Name: Journal of Physical Chemistry B
Subject: Chemicals, plastics and rubber industries
ISSN: 1520-6106
Year: 2001
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