Glass serves as wafer level packaging
Article Abstract:
Shellcase Ltd. of Jerusalem, Israel, has developed ShellPack, a wafer level chip scale packaging technology. The packaging consists of a thinned die that is sandwiched between two glass plates. The shell, 300 to 500 nm thick and no more than 100 micrometer longer or wider than the die, is designed for ultrathin applications such as smart cards and portable products. The technology, which is claimed to have 15% greater resistance than bare silicon of similar thickness, is also targeted as a replacement for direct chip attach (DCA).
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Develops ShellPack, a wafer level chip scale packaging technology
Publication Name: Semiconductor International
Subject: Electronics and electrical industries
ISSN: 0163-3767
Year: 1998
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Absolute pressure control boosts oxide uniformity
Article Abstract:
Control of thickness uniformity has become more important and more difficult as gate oxides start to approach the theoretical minimum thickness. A new pressure controller promises to reduce the pressure- related oxide thickness fluctuations. Results of a measurement test using the new pressure controller indicate that it is ideal for use in thermal oxidations. It has the ability to control to a set absolute prpessure and minimize disturbance due to house exhaust changes.
Publication Name: Semiconductor International
Subject: Electronics and electrical industries
ISSN: 0163-3767
Year: 2000
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Multidisciplinary approaches: target ES&H
Article Abstract:
The Environmentally Benign Semiconductor Manufacturing Engineering Research Center, located in Tucson, AZ, has developed a number of processing techniques aimed at minimizing, recycling and treating waste from IC manufacture. These include PFC replacement methods for chamber cleaning and etching applications and the generation of solventless, photoimagable, low-k dielectric components. Other approaches such as water use reduction and purification are also being studied.
Publication Name: Semiconductor International
Subject: Electronics and electrical industries
ISSN: 0163-3767
Year: 1999
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