Tailoring polymer properties with ion beams

Article Abstract:

Experiments were conducted on a variety of substrates to demonstrate the versatile nature of ion beam treatment of polymers. Control samples performed in the same pumpdown cycles illustrated poor adhesion to the substrate and delaminated under a tape test. Results indicate that the adhesion of copper onto polymeric materials can be greatly improved by the use of ion beam pre-treatment. Thus, gridless ion beam in technology provides a wide parameter space for exploration and a proven reputation of reliable operation in fabrication environments.

Resin, Synthetic Rubber, and Artificial and Synthetic Fibers and Filaments Manufacturing, Polymers: Plastic, Rubber, Fiber

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The case for continuous flow transport of wafer carriers

Article Abstract:

The Conveyor-type Continuous Flow Transport (CFT) offers several distinctive advantages over traditional car-based monorails and manual delivery systems. The advantages include higher transport capacity, shorter and more predictable delivery times and lower cost-of-ownership which are ideal for the automation requirements of new fabs. The CFT solution for local buffering also increases overall equipment effectiveness and reduces the need for large end-of-bay stockers or larger process tool footprints.

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